應用領域 Application Area | 分類 Classification | 產品名稱 Product Name | 別名 Another Name | 產品品質 Product Quality |
IC | 單品 Single Chemical | 磷酸 | H3PO4 | < 5ppb |
硫酸 | H2SO4 | < 0.01ppb | ||
氫氟酸 | HF | < 0.005ppb | ||
硝酸 | HNO3 | < 0.1ppb | ||
醋酸 | CH3COOH | < 1ppb | ||
鹽酸 | HCL | < 1ppb | ||
N-甲基吡咯烷酮 | NMP | < 5ppb | ||
配方型 Formulated Chemicals | Poly蝕刻液 | M1/PE-1 | < 5ppb | |
減薄液 | Spin-D/D/N-D | < 5ppb | ||
旋轉蝕刻液 | Spin-E/E | < 5ppb | ||
二氧化硅蝕刻液 | BOE/BHF | < 0.1ppb | ||
鋁蝕刻液 | M2/MI/H4 | < 5ppb | ||
邊膠清洗劑EBR | 0K-73/PP-73 | < 5ppb |